JPH0644594Y2 - セラミック盤 - Google Patents
セラミック盤Info
- Publication number
- JPH0644594Y2 JPH0644594Y2 JP1986167053U JP16705386U JPH0644594Y2 JP H0644594 Y2 JPH0644594 Y2 JP H0644594Y2 JP 1986167053 U JP1986167053 U JP 1986167053U JP 16705386 U JP16705386 U JP 16705386U JP H0644594 Y2 JPH0644594 Y2 JP H0644594Y2
- Authority
- JP
- Japan
- Prior art keywords
- polishing table
- ceramic
- transparent body
- identification mark
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 title claims description 14
- 238000005498 polishing Methods 0.000 description 20
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986167053U JPH0644594Y2 (ja) | 1986-10-30 | 1986-10-30 | セラミック盤 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986167053U JPH0644594Y2 (ja) | 1986-10-30 | 1986-10-30 | セラミック盤 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6374267U JPS6374267U (en]) | 1988-05-18 |
| JPH0644594Y2 true JPH0644594Y2 (ja) | 1994-11-16 |
Family
ID=31098620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986167053U Expired - Lifetime JPH0644594Y2 (ja) | 1986-10-30 | 1986-10-30 | セラミック盤 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644594Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0683956B2 (ja) * | 1988-05-25 | 1994-10-26 | 昭和電工株式会社 | 炭化けい素セラミックス製トッププレート |
| JPH0710493Y2 (ja) * | 1991-02-05 | 1995-03-08 | 株式会社エンヤシステム | ウエーハ貼付板 |
| US20090053983A1 (en) * | 2006-01-25 | 2009-02-26 | Jsr Corporation | Chemical mechanical polishing pad and method for manufacturing same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841559Y2 (ja) * | 1979-01-17 | 1983-09-20 | 株式会社スリ−ボンド | 表示体 |
| JPS5944185B2 (ja) * | 1982-03-04 | 1984-10-27 | 不二越機械工業株式会社 | ポリシング用セラミツク定盤の固定装置 |
-
1986
- 1986-10-30 JP JP1986167053U patent/JPH0644594Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6374267U (en]) | 1988-05-18 |
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